Picture of JSM-7401F
Current status:
WARNING
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1st Responsible:
2nd Responsible:
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  • Cold FEG
  • Acc. Voltage: 0.1 ~ 30 kV
  • Maximum current: 2nA
  • Resolution = 1.0 nm (15 kV), 1.5 nm (1kV)
  • Option: EDS (Resolution 137eV, Detectable Z≥B), STEM
Tool name:
JSM-7401F
Area/room:
EMC - SEM
Category:
SEM
Manufacturer:
JEOL
Model:
JSM-7401F
Max booking time, day:
8 hours
Max booking time, night:
12 hours
No. of future bookings:
2

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