Picture of JSM-7401F
Current status:
DOWN
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Responsibles
1st Responsible:
Kjell Jansson
2nd Responsible:
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Description
  • Cold FEG
  • Acc. Voltage: 0.1 ~ 30 kV
  • Maximum current: 2nA
  • Resolution = 1.0 nm (15 kV), 1.5 nm (1kV)
  • Option: EDS (Resolution 137eV, Detectable Z≥B), STEM
Details
Tool name:
JSM-7401F
Area/room:
EMC - SEM
Category:
SEM
Manufacturer:
JEOL
Model:
JSM-7401F
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